ISO 14644-2019 洁净室及相关受控环境-----第3部分：检测方法(中英文版)

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INTERNATIONAL STANDARD ISO 14644-3:2019(E)Cleanrooms and associated controlled environments-Part 3:Test methods

INTERNATIONAL STANDARD国际标准

Second edition第二版

2019-08

ISO14644-3

Cleanrooms and associated controlled environments—

Part 3:Test methods

洁净室及相关受控环境-----

第3部分：检测方法

Salles propres et environnements maitrisés apparentés—Partie 3:Méthodes d'essai

Reference number ISO14644-3:2019(E)

C ISO 2019

ISO 14644-3:2019(E)

ISO 2019

be reproduced or utilized otherwise in any form or by any means,electronic or mechanical,including photocopying,or posting

on the internet or an intranet,without prior written permission.Permission can be requested from either ISO at the address

below or ISO's member body in the country ofthe requester.

ISO copyright office

CP401·Ch.de Blandonnet 8 CH-1214 Vernier,Geneva Phone:+41227490111

Fax:+41227490947

Email:copyright@iso.org

Website:www.iso.org

Published in Switzerland

国际标准 ISO 14644-3:2019(E) 洁净室及相关受控环境第3部分：检测方法 201908 页1/77

INTERNATIONAL STANDARD ISO14644-3:2019(E)Cleanrooms and associated controlled environments-Part 3:Test methods

Contents目录

Foreword

前言

Introduction

引言

1Scope

范围

2 Normative references

引用标准

3 Terms and definitions

术语与定义

3.1 General terms

一般术语

3.2 Terms related to airborne particles

与空气悬浮粒子有关的术语

3.3 Terms related to air filters and systems

与空气过滤器和系统有

3.4 Terms related to airflow and other physical states

与气流和其它物理状态关的术语

3.5 Terms related to electrostatic measurement

与静电测量有关的术语

3.6 Terms related to measuring apparatus and measuring

conditions

与测量仪器和测量条件有关的术语

3.7 Terms related to occupancy states

与占有状态有关的术语

4Test procedures

测试方法

4.1 Cleanroom tests

洁净间测试

4.1.1 General

通则

4.1.2 Supporting tests

支持性测试

4.2 Principle

通则

4.2.1 Air pressure difference test

压差测试

4.2.2 Airflow test

气流测试

4.2.3 Airflow direction test and visualization

气流方向和可视化

4.2.4 Recovery test

自净时间

4.2.5 Temperature test

温度测试

4.2.6 Humidity test

湿度测试

4.2.7 Installed filter system leakage tests

已安装过滤器系统泄漏测试

4.2.8 Containment leak test

封闭性泄漏测试

4.2.9 Electrostatic and ion generator tests

静电和离子发生器测试

4.2.10 Particle deposition test

粒子沉降测试

4.2.11 Segregation test

隔离性测试

5Test reports

测试报告

Annex A(informative) Choice of supporting tests and checklist

附录A(仅供参考)支持性测试选

择与清单

Annex B(informative) Supporting test methods

支持性测试方法

Annex C(informative) Test apparatus

测试仪器

Bibliography

参考文献

国际标准 ISO 14644-3:2019(E) 洁净室及相关受控环境第3部分：检测方法 201908 页2/77

INTERNATIONAL STANDARD ISO14644-3:2019(E)Cleanrooms and associated controlled environments—Part 3:Test methods

国际标准 ISO 14644-3:2019(E) 洁净室及相关受控环境第3部分：检测方法 201908 页3/77

Foreword前言

ISO(the International Organization for Standardization)is a worldwide federation of national standards

bodies (ISO member bodies).The work of preparing International Standards is normally carried out

through ISO technical committees.Each member body interested in a subject for which a technical

committee has been established has the right to be represented on that committee.International

organizations,governmental and non-governmental,in liaison with ISO,also take part in the work.

ISO collaborates closely with the International Electrotechnical Commission (IEC)on all matters of

electrotechnical standardization.

ISO(国际标准化组织)为全球各国标准化组织 (ISO 成员)的联合会。起草制订国际标准的工作通

常是通过ISO 技术委员会完成的。各成员组织若对技术委员会的某个课题感兴趣，均有权参加该技术

委员会的工作。国际上凡与ISO 保持联系的政府的或是非政府的组织，均可参加此项工作。ISO 在电

气技术标准化的各项事宜中，与国际电气技术委员会 (IEC) 有着紧密合作。

The procedures used to develop this document and those intended for its further maintenance are

described in the ISO/IEC Directives,Part 1.In particular,the different approval criteria needed for the

different types of ISO documents should be noted.This document was drafted in accordance with the

editorial rules of the ISO/IEC Directives,Part 2 (see www.iso.org/directives ).

本文件起草及进一步维护依据程序为ISO/IEC 指令第1部分。尤其要注意的是不同类ISO 文件所需的

批准标准是不同的。本文件根据ISO/IEC指令第2部分编辑规定起草。

Attention is drawn to the possibility that some of the elements of this document may be the subject of

patent rights.ISO shall not be held responsible for identifying any or allsuch patent rights.Details of

any patent rights identified during the development of the document will be in the Introduction and/or

on the ISO list of patent declarations received (see www.iso.org/patents ).

请注意本文件的某些内容可能涉及专利权。ISO不对识别任何或全部这类专利权负责。在文件制订过

程中所识别的所有专利权详细信息将在前言和/或所收到的ISO 专利声明清单中列出(参见ww

w.iso.org/patents) 。

Any trade name used in this document is information given for the convenience of users and does not

constitute an endorsement.

本文件中用到的所有商标名称仅为方便用户所提供的信息，并非背书或指定。

For an explanation of the voluntary nature of standards,the meaning of ISO specific terms and

expressions related to conformity assessment,as well as information about ISO's adherence to the

World Trade Organization (WTO)principles in the Technical Barriers to Trade(TBT)see w w

w.iso.org/iso/foreword.html .

关于标准自愿属性的解释，ISO 专用术语的信息以及与符合性评估有关的表述，和 ISO 遵守 WHO 贸

易技术壁垒(TBT) 原则的信息，参见www.iso.org/iso/foreword.html 。

This document was prepared by ISO/TC 209,Cleanrooms and associated controlled environments.

本文件由ISO/TC 209“洁净室和相关受控环境”起草。

Any feedback or questions on this document should be directed to the user's national standards body.A

complete listing of these bodies can be found at www.iso.org/members.html.

所有对本文件的反馈或问题均应提交给用户所在国标准组织机构。在网站ww

w.iso.org/members.html上可找到这些机构的完整清单。

This second edition of ISO 14644-3 cancels and replaces the first edition(ISO 14644-3:2005),which has

been technically revised.The main changes compared to the previous edition are as follows:

本文件为ISO14644-3 的第二版，取代第一版 (ISO 14644:2005)。本版本在前版基础上进行了技术

内容修订。与前版本相比，主要变化有：

—Clause B.7has been simplifiedand corrected to address concerns over its complexity andnotederrors;

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INTERNATIONALSTANDARDISO14644-3:2019(E)Cleanroomsandassociatedcontrolledenvironments-Part3:TestmethodsINTERNATIONALSTANDARD国际标准Secondedition第二版2019-08ISO14644-3Cleanroomsandassociatedcontrolledenvironments—Part3:Testmethods洁净室及相关受控环境-----第3部分：检测方法Sallespropresetenvironnementsmaitrisésapparentés—Part...

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